Patent · US Active

Semiconductor device including a floating gate memory cell with a superlattice channel

US7659539B2 · kind B2 · utility

108Cited by
43References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 5, 2006
Grant dateFeb 9, 2010
Priority date
Expiry dateFeb 11, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/035

Abstract

A semiconductor device may include a semiconductor substrate and at least one non-volatile memory cell. The at least one memory cell may include spaced apart source and drain regions, and a superlattice channel including a plurality of stacked groups of layers on the semiconductor substrate between the source and drain regions. Each group of layers of the superlattice channel may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon, which may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. A floating gate may be adjacent the superlattice channel, and a control gate may be adjacent the second gate insulating layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.