Thermally controlled sold immersion lens fixture
US7660054B2 · kind B2 · utility
5Cited by
1References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2007 |
| Grant date | Feb 9, 2010 |
| Priority date | — |
| Expiry date | Jul 14, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/33
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments allow for uniform die cooling or heating with a solid immersion lens equipped microscope over a larger temperature range than is currently attainable using liquid coolant. The SIL tip is insulated from the rest of the objective body to realize a controllable temperature. This thermal control may be done by convection or Joule heating. If the tip is to be cooled, cold gas may be injected through channels around the tip and fins. If the tip is to be heated, hot gas may be injected around the tip and fins 208 or an electrical heater may be thermal anchored to the tip and a current passed through it to deliver power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.