Robust measurement of parameters
US7660687B1 · kind B1 · utility
4Cited by
9References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 2006 |
| Grant date | Feb 9, 2010 |
| Priority date | — |
| Expiry date | Aug 8, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of increasing consistency between separate parametric measurement readings that are taken with an electron beam imaging tool at different times within a period of time, by correcting drift in the imaging tool at a time frequency that is less than a time period during which the drift is anticipated to be undesirably large.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.