Inventor · Alameda, CA, US

Indranil De

115Patents
8h-index
56Co-inventors
83Inventor score

Filing activity: Jul 1, 2002 → Jun 12, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7280945B1 Apparatus and methods for detection of systematic defects Physics 105 Expired
US6861666B1 Apparatus and methods for determining and localization of failures in test structures using voltage contrast Physics 99 Expired
US9496119B1 E-beam inspection apparatus and method of using the same on various integrated circuit chips Electricity 77 Active
US9799575B2 Integrated circuit containing DOEs of NCEM-enabled fill cells Electricity 17 Active
US9805994B1 Mesh-style NCEM pads, and process for making semiconductor dies, chips, and wafers using in-line measurements from such pads Electricity 13 Active
US9870962B1 Integrated circuit including NCEM-enabled, interlayer overlap-configured fill cells, with NCEM pads formed from at least three conductive stripes positioned between adjacent gates Electricity 12 Active
US9627370B1 Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATE-short-configured, GATECNT-short-configured, and TS-short-configured, NCEM-enabled fill cells Electricity 11 Active
US8770143B2 Multi-region processing system Emerging Cross-Sectional Technologies 9 Active
US10593604B1 Process for making semiconductor dies, chips, and wafers using in-line measurements obtained from DOEs of NCEM-enabled fill cells Electricity 8 Active
US8278735B2 Yttrium and titanium high-k dielectric films Electricity 6 Active
US7560939B1 Electrical defect detection using pre-charge and sense scanning with prescribed delays Physics 6 Active
US8881677B2 Shadow mask for patterned deposition on substrates Chemistry; Metallurgy 5 Active
US9627371B1 Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATE-short-configured, GATECNT-short-configured, and AA-short-configured, NCEM-enabled fill cells Electricity 5 Active
US8882917B1 Substrate processing including correction for deposition location Physics 5 Active
US7660687B1 Robust measurement of parameters Electricity 4 Active
US10978438B1 IC with test structures and E-beam pads embedded within a contiguous standard cell area Electricity 4 Active
US9691672B1 Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATE-short-configured, GATECNT-short-configured, and metal-short-configured, NCEM-enabled fill cells Electricity 4 Active
US9741703B1 Integrated circuit containing standard logic cells and ilbrary-compatible, NCEM-enabled fill cells, including at least via-open-configured, gate-short-configured, TS-short-configured, and AA-short-conigured, NCEM-enabled fill cells Electricity 3 Active
US8039052B2 Multi-region processing system and heads Emerging Cross-Sectional Technologies 3 Active
US9773774B1 Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including chamfer short configured fill cells, and the second DOE including corner short configured fill cells Electricity 3 Active
US8956952B2 Multilayer substrate structure and method of manufacturing the same Chemistry; Metallurgy 3 Active
US10096530B1 Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including stitch open configured fill cells Electricity 3 Active
US10199283B1 Method for processing a semiconductor wager using non-contact electrical measurements indicative of a resistance through a stitch, where such measurements are obtained by scanning a pad comprised of at least three parallel conductive stripes using a moving stage with beam deflection to account for motion of the stage Electricity 3 Active
US9653446B1 Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, TS-short-configured, and AA-short-configured, NCEM-enabled fill cells Electricity 2 Active
US9761575B1 Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least chamfer-short-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured, NCEM-enabled fill cells Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.