Substrate processing apparatus
US7665415B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2006 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Mar 15, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67294
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
LEDs in an LED display part are arranged so as to have approximately the same placing form as containers. When a chemical solution in a container is exhausted, a corresponding LED of the LED display part lights up. Prior to an operation of replacing the container, an operator allows a bar code reader to read a bar code of an unused container. A bar code reader collator collates the bar code data of the unused container with the bar code data of a container corresponding to the lighting LED, which is already registered in a data base. When the bar code reader collator judges that the chemical solutions in the both containers are identical, the display of the LED is changed from a lighting-up display to a flashing display. This makes it easy to recognize the disposing position of the empty container to be replaced, thereby effectively preventing incorrect replacement of the container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.