System to transfer a template transfer body between a motion stage and a docking plate
US7665981B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2005 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Jun 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/707
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.