Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
US7667050B2 · kind B2 · utility
0Cited by
10References
26Claims
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Key dates
| Filing date | Aug 15, 2007 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Mar 3, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/74
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention provides a salt represented by the formula (I):wherein
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.