Substrate processing system, substrate processing method and computer-readable storage medium storing verification program
US7676296B2 · kind B2 · utility
2Cited by
1References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2006 |
| Grant date | Mar 9, 2010 |
| Priority date | — |
| Expiry date | Mar 13, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.