Support structure for MEMS device and methods therefor
US7679812B2 · kind B2 · utility
65Cited by
59References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2006 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Jan 29, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/014
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.