Image processing method, substrate inspection method, substrate inspection apparatus and method of generating substrate inspection data
US7680320B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2005 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Dec 20, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30152
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A color image as a combination of color data corresponding to a plural n-number of different hues is processed by extracting a target object from the image and carrying out a specified image processing. A reference image is obtained in the absence of the target object. Color data corresponding to specified less than n of the different hues are considered and difference in the degree of intensity of the considered color data relative to the combination of color data corresponding to n different hues between each pixel of the target image containing the target object and a corresponding pixel on the reference image are extracted. Pixels for which the extracted difference is greater than a specified threshold value and is in a specified direction are extracted. An image area formed by the extracted pixels are recognized as the target object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.