System and method for producing and delivering vapor
US7680399B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2006 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Sep 6, 2028 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF22B35/00
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.