Brooks Instrument, LLC
25Patents
21Active
25Granted
49Portfolio score
Filing activity: Oct 17, 2003 → Jun 8, 2012 · 18 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8504318B2 | System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor | Physics | 45 | Active |
| US7905139B2 | Mass flow controller with improved dynamic | Physics | 26 | Active |
| US7874208B2 | System for and method of providing a wide-range flow controller | Physics | 24 | Active |
| US8100382B2 | Valve assembly | Mechanical Engineering; Lighting; Heating | 22 | Expired |
| US7680399B2 | System and method for producing and delivering vapor | Mechanical Engineering; Lighting; Heating | 21 | Active |
| US7636640B2 | Multi-gas flow device | Emerging Cross-Sectional Technologies | 21 | Active |
| US7748268B2 | Thermal flow meter | Physics | 18 | Active |
| US7991510B2 | Flow measurement and control with bubble detection | Physics | 18 | Active |
| US8197133B2 | System and method for sensor thermal drift offset compensation | Physics | 17 | Active |
| US8751180B2 | Methods and apparatus for pressure compensation in a mass flow controller | Emerging Cross-Sectional Technologies | 15 | Active |
| US8118054B2 | Solenoid needle valve assembly | Emerging Cross-Sectional Technologies | 9 | Active |
| USD590734S1 | Mass flow controller | General | 8 | Expired |
| US7377152B2 | Method and device for determining a characteristic value that is representative of the condition of a gas | Physics | 8 | Expired |
| US8887549B2 | Valve leakby diagnostics | Emerging Cross-Sectional Technologies | 8 | Active |
| US8068999B2 | Multi-gas flow device | Emerging Cross-Sectional Technologies | 8 | Active |
| US8010303B2 | Multi-gas flow device | Emerging Cross-Sectional Technologies | 7 | Active |
| US7941284B1 | Systems, apparatuses, and methods for measuring a fluid characteristic using a coriolis flow meter | Physics | 7 | Active |
| US8141430B2 | Monolithic vacuum manometer utilizing electrostatic interference as a means of detection | Emerging Cross-Sectional Technologies | 6 | Active |
| US8511169B2 | Monolithic vacuum manometer utilizing electrostatic interference as a means of detection | Emerging Cross-Sectional Technologies | 4 | Active |
| US7720617B2 | Flow sensor signal conversion | Physics | 3 | Active |
| USD584179S1 | Mass flow controller | General | 3 | Expired |
| US9464729B2 | Pressure balanced valve | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US9099231B2 | Pressure retaining sleeve | Electricity | 1 | Active |
| US9631993B2 | Self-heated MEMs based capacitance diaphragm gauge | Physics | 0 | Active |
| US7720628B2 | Digitally controlled sensor system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.