Patent · US Active

Method for correcting an error of the imaging system of a coordinate measuring machine

US7680616B2 · kind B2 · utility

1Cited by

3References

9Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Michael Heiden · Blieskastel, DE
Klaus Rinn · Heuchelheim, DE

Key dates

Filing date	Jul 15, 2008
Grant date	Mar 16, 2010
Priority date	—
Expiry date	Jul 15, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG03F1/84
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientation. Then the position of the at least two different edges of the at least one structure is measured on the rotated substrate. Based on the measurement data, a systematic error of the imaging system is eliminated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.