Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids
US7681581B2 · kind B2 · utility
12Cited by
42References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2006 |
| Grant date | Mar 23, 2010 |
| Priority date | — |
| Expiry date | Mar 29, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/85938
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Apparatuses, and related methods, for processing a workpiece that include particular baffle members or duct structures having an inlet proximal to an outer periphery of a workpiece and/or workpiece support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.