Alan D. Rose
18Patents
7h-index
17Co-inventors
63Inventor score
Filing activity: Dec 15, 1987 → Apr 26, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5423942A | Method and apparatus for reducing etching erosion in a plasma containment tube | Emerging Cross-Sectional Technologies | 458 | Expired |
| US4792378A | Gas dispersion disk for use in plasma enhanced chemical vapor deposition reactor | Electricity | 275 | Expired |
| US4820371A | Apertured ring for exhausting plasma reactor gases | Electricity | 49 | Expired |
| US7913706B2 | Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses | Electricity | 12 | Active |
| US7681581B2 | Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids | Emerging Cross-Sectional Technologies | 12 | Active |
| US8235062B2 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Emerging Cross-Sectional Technologies | 11 | Active |
| US8387635B2 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Electricity | 8 | Active |
| US9564378B2 | Detection of lost wafer from spinning chuck | Electricity | 7 | Active |
| US8544483B2 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8684015B2 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Emerging Cross-Sectional Technologies | 4 | Active |
| US8656936B2 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Emerging Cross-Sectional Technologies | 3 | Active |
| US8899248B2 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Emerging Cross-Sectional Technologies | 3 | Active |
| US9666456B2 | Method and apparatus for treating a workpiece with arrays of nozzles | Electricity | 1 | Active |
| US8967167B2 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Electricity | 0 | Active |
| US8668778B2 | Method of removing liquid from a barrier structure | Electricity | 0 | Active |
| US8978675B2 | Method and apparatus for treating a workpiece with arrays of nozzles | Electricity | 0 | Active |
| US11207715B2 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Physics | 0 | Active |
| US9039840B2 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.