Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
US7690881B2 · kind B2 · utility
505Cited by
13References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 30, 2006 |
| Grant date | Apr 6, 2010 |
| Priority date | — |
| Expiry date | Aug 3, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, includes: an arm having a distal end which is laterally movable in a straight line direction; and end-effectors for loading and unloading substrates in a reaction chamber, which include a lower end-effector and an upper end-effector. One of the lower end-effector or the upper end-effector is movably coupled to the arm at a distal end of the arm, and the other end-effector is fixed to the movably coupled end-effector. The fixed end-effector is fixed to the movably coupled end-effector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.