Method and device for load matching
US7692389B2 · kind B2 · utility
2Cited by
17References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 2, 2007 |
| Grant date | Apr 6, 2010 |
| Priority date | — |
| Expiry date | Aug 10, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/38
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The impedance of a variable load is matched to the output resistance of an HF generator by performing a first impedance matching for a first load impedance and by performing a second impedance matching for a second load impedance. The first impedance matching is carried out at a first frequency and the second impedance matching is carried out at a second frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.