Inventor · Teningen, DE

Thomas Kirchmeier

19Patents
9h-index
24Co-inventors
68Inventor score

Filing activity: Jun 15, 2004 → May 19, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US8129653B2 Plasma supply device Emerging Cross-Sectional Technologies 84 Active
US7652901B2 High frequency excitation system Emerging Cross-Sectional Technologies 68 Active
US7745955B2 RF plasma supply device Electricity 51 Active
US7440301B2 High frequency excitation system Emerging Cross-Sectional Technologies 44 Active
US7705676B2 Class D amplifier arrangement Electricity 43 Active
US7274266B2 Radio frequency excitation arrangement Electricity 36 Expired
US8421377B2 Protecting high-frequency amplifers Emerging Cross-Sectional Technologies 35 Active
US7161818B2 High frequency excitation system Emerging Cross-Sectional Technologies 18 Expired
US8222885B2 Isolating a control signal source in a high frequency power supply Emerging Cross-Sectional Technologies 9 Active
US8482205B2 Driving switches of a plasma load power supply Emerging Cross-Sectional Technologies 6 Active
US7755451B2 Directional coupler Electricity 3 Active
US8643279B2 Determining high frequency operating parameters in a plasma system Emerging Cross-Sectional Technologies 3 Active
US7692389B2 Method and device for load matching Electricity 2 Active
US8653405B2 Method for operating a vacuum plasma process system Electricity 1 Active
US10209294B2 Method for producing an arc detection signal and arc detection arrangement Electricity 1 Active
US8436543B2 Plasma supply device Emerging Cross-Sectional Technologies 0 Active
US10374923B2 Vehicle having an ethernet bus system and method for operating such a bus system Electricity 0 Active
US8357874B2 Radio frequency power supply Emerging Cross-Sectional Technologies 0 Active
US8866400B2 Plasma supply device Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.