Controller and method to mediate data collection from smart sensors for fab applications
US7693687B2 · kind B2 · utility
18Cited by
35References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2006 |
| Grant date | Apr 6, 2010 |
| Priority date | — |
| Expiry date | Dec 4, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.