Method for eliminating sources of error in the system correction of a coordinate measuring machine

US7694426B2 · kind B2 · utility

Assignee

• Vistec Semiconductor Systems GmbH · DE

Inventors

• Michael Heiden · Blieskastel, DE
• Klaus Rinn · Heuchelheim, DE

Key dates

• Filing date: Jan 31, 2008
• Grant date: Apr 13, 2010
• Expiry date: Nov 21, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/045
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method is disclosed for eliminating sources of error in the system correction of a coordinate measuring machine. Herein, a number j of reference structures 33 on a rigid reference object 30 are measured in a starting orientation k=0, and the starting coordinates and the reference coordinates of the reference structures 33 on the reference object 30 are determined in a number k≧3 of mutually different orientations.