Patent · US Active

Method for the nondestructive material testing of highly pure polycrystalline silicon

US7694568B2 · kind B2 · utility

4Cited by

12References

13Claims

0Family size

Assignee

Wacker Chemie AG · DE

Inventors

Andreas Hegen · Burghausen, DE
Matthaeus Schantz · Simbach, DE
Bruno Lichtenegger · Emmerting, DE

Key dates

Filing date	Aug 21, 2007
Grant date	Apr 13, 2010
Priority date	—
Expiry date	Mar 2, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/2695
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Noncontaminating and nondestructive testing of a shaped polysilicon body for a material defect is accomplished by exposing the shaped polysilicon body to ultrasound waves, and the ultrasound waves are registered by an ultrasound receiver after they have passed through the shaped polysilicon body or reflected therein, so that material defects in the polysilicon are detected.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.