Scanning electron microscope
US7705302B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2008 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Oct 15, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24495
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.