Exposure data generation method and device, exposure data verification method and device and storage medium
US7707540B2 · kind B2 · utility
0Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 28, 2006 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Oct 7, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/36
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Exposure verification is applied to exposure data indicating a pattern to be exposed by a charged particle beam. If an error point is extracted from the exposure data by the exposure verification, the values of coefficients are modified and exposure data is regenerated taking into consideration the coefficients whose values have been modified. Thus, exposure data is re-generated by changing each of the coefficient values within its appropriate range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.