Patent · US Active

Optical element driving apparatus

US7710626B2 · kind B2 · utility

5Cited by
3References
7Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 23, 2007
Grant dateMay 4, 2010
Priority date—
Expiry dateMay 27, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/70266
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

At least one exemplary embodiment is directed to an optical element driving apparatus which includes a first actuator configured to drive an optical element in accordance with a deformation target value, a sensor arranged to measure a position and an orientation of the optical element, a second actuator configured to drive the optical element in accordance with position and orientation target values and an output of the sensor, and a correcting unit configured to correct a measurement error of the sensor caused by deformation of the optical element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.