Hirohito Ito
24Patents
9h-index
23Co-inventors
75Inventor score
Filing activity: Jun 17, 1985 → Nov 20, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6028376A | Positioning apparatus and exposure apparatus using the same | Emerging Cross-Sectional Technologies | 62 | Expired |
| US6359679B1 | Positioning device, exposure device, and device manufacturing method | Physics | 32 | Expired |
| US5939852A | Stage feeding device | Physics | 31 | Expired |
| US6559579B2 | Alumina-based sintered body insulator for spark plugs | Electricity | 17 | Expired |
| US6265816A | Spark plug, insulator for spark plug and process for fabricating the insulator | Electricity | 17 | Expired |
| US6008882A | Stage device, method of controlling same, and exposure apparatus using said stage device | Physics | 15 | Expired |
| US4658647A | Accelerometer | Physics | 11 | Expired |
| US7443619B2 | Optical element holding apparatus, exposure apparatus and device manufacturing method | Physics | 10 | Active |
| US7615915B2 | Spark plug | Electricity | 9 | Active |
| US7352121B2 | Spark plug | Electricity | 6 | Expired |
| US7710626B2 | Optical element driving apparatus | Physics | 5 | Active |
| US5976674A | Transfer sheet, a method of transferring a figuration therefrom and a ceramic product on which the figuration is printed | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8625077B2 | Positioning apparatus, exposure apparatus, and device manufacturing method | Physics | 4 | Active |
| US8562323B2 | Imprint apparatus and method for producing article | Performing Operations; Transporting | 4 | Active |
| US7771065B2 | Optical unit and exposure apparatus having the same | Physics | 3 | Expired |
| US7444817B2 | Optical micromotor, micropump using same and microvalve using same | Electricity | 3 | Active |
| US6214150A | Method of transfer printing a ceramic spark plug insulator | Emerging Cross-Sectional Technologies | 2 | Expired |
| US8618516B2 | Charged-particle beam exposure apparatus and method of manufacturing article | Electricity | 2 | Active |
| US6688932B2 | Method for manufacturing spark plug and caulking metallic mold | Chemistry; Metallurgy | 2 | Expired |
| US7738232B2 | Alignment apparatus | Electricity | 1 | Active |
| US7453623B2 | Reflecting mirror and exposure apparatus using the same | Physics | 1 | Expired |
| US7530795B2 | Fluid control mechanism | Mechanical Engineering; Lighting; Heating | 1 | Expired |
| US8981321B2 | Charged-particle beam exposure apparatus and method of manufacturing article | Electricity | 0 | Active |
| US8829461B2 | Scanning apparatus, drawing apparatus, and method of manufacturing article | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.