Ceramic/organic hybrid substrate
US7714432B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 26, 2002 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Jul 26, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19106
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device is provided that includes one or more ceramic material layers and one or more low dielectric constant (low-K) epoxy layers on top to be electrically coupled to an integrated circuit device, such as a chip die. The resulting ceramic/organic hybrid substrate takes advantage of the thin low-cost, low-K epoxy layer, by routing the dense circuitry from the chip die to the ceramic material layer. In addition, the use of low-K epoxy layer may reduce the number of ceramic material layers required to about three layers, thus significantly reducing the cost of the substrate. Low-K epoxy material layer may be laminated onto the ceramic material layer to reduce throughput time and cost. The ceramic/organic hybrid substrate may also take advantage of the properties of ceramic materials, which have a much more rigid structure than organic materials and a low CTE (coefficient of thermal expansion) that works well with ultra low-K chip dies. The ceramic/organic hybrid substrate also may make possible the fabrication of a bottom cavity package for capacitors placement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.