Automatic inspection system for flat panel substrate
US7714996B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2007 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Jan 1, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0627
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Automatic optical inspection (AOI) systems are described comprising optical modules that include an illumination component and a lens array configured to direct illumination of the illumination component at a portion of a substrate. The lens array includes a Fresnel lens. The optical module includes a camera that receives reflected light resulting from an interaction of the illumination and the substrate. The camera includes a time delay integration (TDI) sensor. A telecentric imaging lens directs reflected light from the substrate to the camera. The illumination component comprises a controller coupled to multiple LED light sources, each emitting light at a different wavelength. The controller independently controls each LED light source. The illumination component includes a bright field and/or a dark field light source. The illumination component can include a front side and/or a back side light source. An optical fiber is coupled to the camera and an image processor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.