Patent · US Active

Scanning head for optical position-measuring systems

US7719075B2 · kind B2 · utility

2Cited by

5References

20Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Peter Speckbacher · Kirchweidach, DE
Josef Weidmann · Feichten, DE
Christopher Eisele · Traunwalchen, DE
Elmar Mayer · Nußdorf, DE
Reiner Burgschat · Jena, DE

Key dates

Filing date	Jul 29, 2004
Grant date	May 18, 2010
Priority date	—
Expiry date	Jun 19, 2026

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E10/548
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanning head for an optical position-measuring system includes a receiver grating, formed of photosensitive areas, for the scanning of locally intensity-modulated light of differing wavelengths. The receiver grating is formed from a semiconductor layer stack of a doped p-layer, an intrinsic i-layer and a doped n-layer. The individual photosensitive areas have a first doped layer and at least a part of the intrinsic layer in common and are electrically separated from one another by interruptions in the second doped layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.