Semiconductor processing
US7722441B2 · kind B2 · utility
10Cited by
64References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2006 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Dec 7, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Semiconductor processing and equipment are disclosed. The semiconductor equipment and processing provide semiconductor wafers with reduced defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.