MEMS switches with deforming membranes
US7724417B2 · kind B2 · utility
3Cited by
26References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2006 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Nov 6, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49105
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.