Replaceable probe apparatus for probing semiconductor wafer
US7728609B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2008 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | May 30, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07364
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.