Test instrument probe with MEMS attenuator circuit
US7728610B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2009 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Feb 4, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2007/006
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
One or more micromachined (MEMS) switches switch attenuators, such as resistors, into or out of a signal path, such as of a test instrument. The MEMS switches can be fabricated on the same substrate as the attenuators, or the switches or attenuators can be mounted on the same substrate as the others are fabricated. An instrument probe includes attenuators and MEMS switches that are controlled by the instrument and/or by a control circuit in the probe. Optionally, the probe includes reactive elements, such as capacitors, and MEMS switches to compensate for electrical characteristics of the probe and/or probe lead, and the probe or a test instrument automatically sets the MEMS switches to connect appropriate ones of the reactive elements to a signal path within the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.