Probe card assembly and method of forming same
US7728612B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2007 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Nov 21, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53243
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card assembly has a probe contactor substrate having a plurality of probe contactor tips thereon and a probe card wiring board with an interposer disposed between the two. Support posts contacting the probe contactor substrate are vertically adjustable until secured by a locking mechanism which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contactor substrates is substantially parallel to a predetermined reference plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.