Quantum dot based optoelectronic device and method of making same
US7732237B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2005 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Sep 13, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/951
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming an optically active region on a silicon substrate includes the steps of epitaxially growing a silicon buffer layer on the silicon substrate and epitaxially growing a SiGe cladding layer having a plurality of arrays of quantum dots disposed therein, the quantum dots being formed from a compound semiconductor material having a lattice mismatch with the silicon buffer layer. The optically active region may be incorporated into devices such as light emitting diodes, laser diodes, and photodetectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.