Method and arrangement for positioning a probe card

US7733108B2 · kind B2 · utility

Assignee

• SUSS MicroTec Test Systems GmbH · DE

Inventors

• Stojan Kanev · Sacka, DE
• Hans-Jurgen Fleischer · Großenhain, DE
• Stefan Kressig · Bonn, DE
• Jorg Kiesewetter · Thiendorf, DE

Key dates

• Filing date: Dec 8, 2008
• Grant date: Jun 8, 2010
• Expiry date: Dec 8, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2887
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.