Test structure for resistive open detection using voltage contrast inspection and related methods
US7733109B2 · kind B2 · utility
92Cited by
9References
29Claims
0Family size
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Key dates
| Filing date | Oct 15, 2007 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | May 26, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test structure for resistive open detection using voltage contrast (VC) inspection and method for using such structure are disclosed. The test structure may include a comparator within the IC chip for comparing a resistance value of a resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether the resistive open exists in the resistive element under test, wherein the result is detectable by the voltage contrast inspection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.