Inventor · Poughkeepsie, NY, US

Oliver D. Patterson

30Patents
17h-index
45Co-inventors
81Inventor score

Filing activity: Oct 4, 1993 → Mar 30, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US7474107B2 Buried short location determination using voltage contrast inspection Physics 98 Active
US7679083B2 Semiconductor integrated test structures for electron beam inspection of semiconductor wafers Electricity 97 Active
US7456636B2 Test structures and method of defect detection using voltage contrast inspection Physics 92 Expired
US7733109B2 Test structure for resistive open detection using voltage contrast inspection and related methods Electricity 92 Active
US7518190B2 Grounding front-end-of-line structures on a SOI substrate Electricity 92 Active
US8927989B2 Voltage contrast inspection of deep trench isolation Electricity 86 Active
US7772866B2 Structure and method of mapping signal intensity to surface voltage for integrated circuit inspection Electricity 85 Active
US8399266B2 Test structure for detection of gap in conductive layer of multilayer gate stack Electricity 84 Active
US8350583B2 Probe-able voltage contrast test structures Physics 84 Active
US8039837B2 In-line voltage contrast detection of PFET silicide encroachment Electricity 76 Active
US8750597B2 Robust inspection alignment of semiconductor inspection tools using design information Physics 60 Active
US9213060B2 Probe-able voltage contrast test structures Physics 59 Active
US9519210B2 Voltage contrast characterization structures and methods for within chip process variation characterization Electricity 58 Active
US9097760B2 Probe-able voltage contrast test structures Physics 58 Active
US9103875B2 Probe-able voltage contrast test structures Physics 58 Active
US8766259B2 Test structure for detection of gap in conductive layer of multilayer gate stack Electricity 58 Active
US5461559A Hierarchical control system for molecular beam epitaxy Physics 30 Expired
US7927895B1 Varying capacitance voltage contrast structures to determine defect resistance Electricity 8 Active
US7547560B2 Defect identification system and method for repairing killer defects in semiconductor devices Electricity 4 Active
US7732866B2 Grounding front-end-of-line structures on a SOI substrate Electricity 4 Active
US7397556B2 Method, apparatus, and computer program product for optimizing inspection recipes using programmed defects Physics 2 Active
US8841933B2 Inspection tool and methodology for three dimensional voltage contrast inspection Physics 2 Active
US8787074B2 Static random access memory test structure Electricity 2 Active
US6906538B2 Alternating pulse dual-beam apparatus, methods and systems for voltage contrast behavior assessment of microcircuits Physics 1 Expired
US10649026B2 Apparatus for and method of net trace prior level subtraction Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.