Patent · US Active

Extreme UV and soft X ray generator

US7734014B2 · kind B2 · utility

3Cited by

10References

13Claims

0Family size

Assignee

KONINKLIJKE PHILIPS ELECTRONICS NV · NL

Inventors

Klaus Bergmann · Heilbronn, DE
Willi Neff · Kelmis, BE

Key dates

Filing date	Jul 29, 2004
Grant date	Jun 8, 2010
Priority date	—
Expiry date	Nov 26, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH05G2/0092
WIPO fieldMedical technology
WIPO sectorInstruments

Abstract

A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the admission and evacuation of gas, and one electrode that has an opening that defines an axis of symmetry and is provided for the discharge of radiation. A diaphragm exhibits at least one opening on the axis of symmetry and operates as a differential pump stage, between the two electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.