System and method for reducing speckle noise in die-to-die inspection systems
US7738092B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 8, 2008 |
| Grant date | Jun 15, 2010 |
| Priority date | — |
| Expiry date | Dec 7, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods are provided herein for eliminating speckle noise in die-to-die inspection systems. In one embodiment, an illumination system in accordance with the present invention may include a coherent light source, a diffuser, a first detector, a second detector and a controller. The diffuser may be coupled within an illumination path between the coherent light source and the specimen. In one embodiment, the diffuser may be a rotational diffuser having a variable rotational rate. The first detector may be coupled for detecting a desired position on the specimen. The second detector may be coupled for detecting a rotational position of the diffuser when the desired position on the specimen is detected. The controller may be coupled to: (i) the first and second detectors for determining a difference between the rotational position of the diffuser and the desired position on the specimen, and (ii) the diffuser for adjusting the rotational rate of the diffuser to eliminate the difference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.