Inventor · Danville, CA, US

Stan Stokowski

11Patents
8h-index
15Co-inventors
61Inventor score

Filing activity: Mar 7, 2002 → May 6, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US7123356B1 Methods and systems for inspecting reticles using aerial imaging and die-to-database detection Physics 75 Expired
US7379175B1 Methods and systems for reticle inspection and defect review using aerial imaging Physics 60 Expired
US7027143B1 Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths Physics 59 Expired
US7738093B2 Methods for detecting and classifying defects on a reticle Physics 35 Active
US6844927B2 Apparatus and methods for removing optical abberations during an optical inspection Physics 23 Expired
US6922236B2 Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection Physics 15 Expired
US6727512B2 Method and system for detecting phase defects in lithographic masks and semiconductor wafers Physics 14 Expired
US7133119B1 Systems for simulating high NA and polarization effects in aerial images Physics 13 Expired
US8194240B1 Enhanced focusing capability on a sample using a spot matrix Physics 7 Active
US6646281B1 Differential detector coupled with defocus for improved phase defect sensitivity Physics 7 Expired
US7738092B1 System and method for reducing speckle noise in die-to-die inspection systems Physics 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.