Patent · US Active

Optical element, projection lens and associated projection exposure apparatus

US7738187B2 · kind B2 · utility

46Cited by

3References

31Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Alexandra Pazidis · Aalen, DE
Stephan Six · Aalen, DE
Ruediger Duesing · Neu-Ulm, DE
Gennady Fedosenko · Aalen, DE

Key dates

Filing date	Jun 5, 2008
Grant date	Jun 15, 2010
Priority date	—
Expiry date	Dec 10, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70958
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical element (1) made of a material that is transparent to wavelengths in the UV region, which optical element (1) includes an oleophobic coating (6, 7) outside of its optically free diameter whose disperse component of the surface energy is preferably 25 mN/m or less, particularly preferably 20 mN/m or less, in particular 15 mN/m or less. In addition or as an alternative, the optical element (1) within its optically free diameter comprises an oleophilic coating (9b, 9c) that is transparent to wavelengths in the UV region, with the disperse component of the surface energy of this coating preferably being more than 25 mN/m, particularly preferably more than 30 mN/m, in particular more than 40 mN/m. The optical element may be provided in an arrangement in which it dips at least partially into an organic liquid.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.