Alignment apparatus
US7738232B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 30, 2004 |
| Grant date | Jun 15, 2010 |
| Priority date | — |
| Expiry date | Dec 1, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/0354
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In driving a movable body in a target direction, a force in another direction, which may act on the movable body, is reduced. A system includes a current amplifier, which drives X1 and X2 electromagnets (a first actuator) for aligning the movable body in the X direction, a system including a current amplifier, which drives Y1 and Y2 electromagnets (a second actuator) for aligning the movable body in the Y direction, a subordinate direction component correction unit, which reduces a force in the Y direction acting on the movable body when driving the movable body in the X direction by the first actuator, and a subordinate direction component correction unit, which reduces a force in the X direction acting on the movable body when driving the movable body in the Y direction by the second actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.