Method for testing the leakage rate of vacuum encapsulated devices

US7739900B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Wolfgang Reinert · Neumünster, DE
• Dirk Kaehler · Itzehoe, DE
• Peter Merz · Hanerau-Hademarschen, DE

Key dates

• Filing date: Nov 10, 2005
• Grant date: Jun 22, 2010
• Expiry date: May 11, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/226
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention is directed to a method for testing the leakage rate of an encapsulated device comprising the step: bombing the device with a neon and/or argon atmosphere using a bombing pressure of at least more than environmental pressure and measuring the quality factor before and after bombing. Preferably, the bombing time is about 10 to 100 hours, and the bombing pressure is 1.5 to 100 bar, more preferably 1.5 to 5 bar and most preferably about 4 bar. With this test, the leakage rate of fine leaks of the device may be determined.