Method of treating a gas stream
US7740815B2 · kind B2 · utility
5Cited by
3References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2006 |
| Grant date | Jun 22, 2010 |
| Priority date | — |
| Expiry date | Mar 13, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00265
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of treating a gas stream containing silane or other silicon-containing gas is described, in which the gas stream is conveyed to a liquid ring pump or screw-mechanism pump, to which are also supplied an oxidant for oxidising the silicon-containing gas within the pump, and a liquid for forming a liquid ring or intermittent flushing within the pump. A liquid stream containing said liquid and a by-product of the oxidation of the silicon-containing gas is exhaust from the pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.