Phase contrast electron microscope

US7741602B2 · kind B2 · utility

Assignee

• Carl Zeiss NTS GmbH · US

Inventors

• Gerd Benner · Aalen, DE
• Marko Matijevic · Ljubljana, SI

Key dates

• Filing date: Mar 13, 2007
• Grant date: Jun 22, 2010
• Expiry date: Apr 21, 2028

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/0492
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.