Gerd Benner
27Patents
9h-index
30Co-inventors
75Inventor score
Filing activity: Jul 24, 1989 → Mar 20, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9349571B2 | Particle optical system | Electricity | 25 | Active |
| US9991089B2 | Particle beam system and method for operating a particle optical unit | Electricity | 23 | Active |
| US5013913A | Method of illuminating an object in a transmission electron microscope | Electricity | 22 | Expired |
| US6040576A | Energy filter, particularly for an electron microscope | Electricity | 21 | Expired |
| US6657211B2 | Process for electron beam lithography, and electron-optical lithography system | Electricity | 16 | Expired |
| US6797956B2 | Electron microscope with annular illuminating aperture | Electricity | 15 | Expired |
| US5483073A | Method of illuminating an object with a focused electron beam and an electron-optical illuminating system therefor | Electricity | 13 | Expired |
| US5519216A | Electron-optical imaging system having controllable elements | Electricity | 10 | Expired |
| US6531698B1 | Particle-optic illuminating and imaging system with a condenser-objective single field lens | Electricity | 9 | Expired |
| US6437353B1 | Particle-optical apparatus and process for the particle-optical production of microstructures | Electricity | 9 | Expired |
| US7741602B2 | Phase contrast electron microscope | Electricity | 9 | Active |
| US7902506B2 | Phase-shifting element and particle beam device having a phase-shifting element | Electricity | 6 | Active |
| US9799485B2 | Particle beam system and method for operating a particle optical unit | Electricity | 4 | Active |
| US8471203B2 | Particle-beam microscope | Electricity | 3 | Active |
| US8476589B2 | Particle beam microscope | Electricity | 3 | Active |
| US8173963B2 | Phase-shifting element and particle beam device having a phase-shifting element | Electricity | 3 | Active |
| US8431894B2 | Electron beam device | Electricity | 2 | Active |
| US7060978B2 | Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system | Electricity | 2 | Expired |
| US8748819B2 | Transmission electron microscopy system and method of operating a transmission electron microscopy system | Electricity | 1 | Active |
| US8598526B2 | Transmission electron microscope | Electricity | 1 | Active |
| US9543115B2 | Electron microscope | Electricity | 1 | Active |
| US8299442B2 | Particle beam apparatus having an annularly-shaped illumination aperture | Electricity | 1 | Active |
| US8541739B2 | Precession diffraction charged particle beam system | Physics | 1 | Active |
| US10811216B2 | Method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping | Electricity | 0 | Active |
| US8039796B2 | Phase contrast electron microscope | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.