Inventor · Aalen, DE

Gerd Benner

27Patents
9h-index
30Co-inventors
75Inventor score

Filing activity: Jul 24, 1989 → Mar 20, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US9349571B2 Particle optical system Electricity 25 Active
US9991089B2 Particle beam system and method for operating a particle optical unit Electricity 23 Active
US5013913A Method of illuminating an object in a transmission electron microscope Electricity 22 Expired
US6040576A Energy filter, particularly for an electron microscope Electricity 21 Expired
US6657211B2 Process for electron beam lithography, and electron-optical lithography system Electricity 16 Expired
US6797956B2 Electron microscope with annular illuminating aperture Electricity 15 Expired
US5483073A Method of illuminating an object with a focused electron beam and an electron-optical illuminating system therefor Electricity 13 Expired
US5519216A Electron-optical imaging system having controllable elements Electricity 10 Expired
US6531698B1 Particle-optic illuminating and imaging system with a condenser-objective single field lens Electricity 9 Expired
US6437353B1 Particle-optical apparatus and process for the particle-optical production of microstructures Electricity 9 Expired
US7741602B2 Phase contrast electron microscope Electricity 9 Active
US7902506B2 Phase-shifting element and particle beam device having a phase-shifting element Electricity 6 Active
US9799485B2 Particle beam system and method for operating a particle optical unit Electricity 4 Active
US8471203B2 Particle-beam microscope Electricity 3 Active
US8476589B2 Particle beam microscope Electricity 3 Active
US8173963B2 Phase-shifting element and particle beam device having a phase-shifting element Electricity 3 Active
US8431894B2 Electron beam device Electricity 2 Active
US7060978B2 Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system Electricity 2 Expired
US8748819B2 Transmission electron microscopy system and method of operating a transmission electron microscopy system Electricity 1 Active
US8598526B2 Transmission electron microscope Electricity 1 Active
US9543115B2 Electron microscope Electricity 1 Active
US8299442B2 Particle beam apparatus having an annularly-shaped illumination aperture Electricity 1 Active
US8541739B2 Precession diffraction charged particle beam system Physics 1 Active
US10811216B2 Method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping Electricity 0 Active
US8039796B2 Phase contrast electron microscope Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.