System and method for de-embedding a device under test employing a parametrized netlist
US7741857B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2008 |
| Grant date | Jun 22, 2010 |
| Priority date | — |
| Expiry date | Dec 13, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
S-parameter data is measured on an embedded device test structure, an open dummy, and a short dummy. A 4-port network of the pad set parasitics of the embedded device test structure is modeled by a parameterized netlist containing a lumped element network having at least one parameterized lumped element. The S-parameter data across a range of measurement frequencies is fitted with the parameterized netlist employing the at least one parameterized lumped element as at least one fitting parameter for the S-parameter data. Thus, the fitting method is a multi-frequency fitting for the at least one parameterized lumped element. A 4-port Y-parameter (admittance parameter) is obtained from the fitted parameterized netlist. The Y-parameter of the device under test is obtained from the measured admittance of the embedded device test structure and the calculated 4-port Y parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.