Fail-safe pneumatically actuated valve with fast time response and adjustable conductance
US7744060B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 18, 2004 |
| Grant date | Jun 29, 2010 |
| Priority date | — |
| Expiry date | Oct 12, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87209
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Apparatus and method for fail-safe high-speed-pneumatic valve is disclosed. Fail-safe dependability is provided by a spring-loaded normally-closed pneumatic actuator. When the spring-loaded actuator is pressurized, the normally closed mechanism is actuated to the valve active position. Concurrently, the pressure is directly applied to deflect a diaphragm or a bellow-assembly back to sealing position. Ultra high purity embodiments with standard dome shaped diaphragms are disclosed. Additional high conductance diaphragms and bellows embodiments are employed for higher conductance valves. Novel flow path layouts are disclosed. The valves are applicable for fast gas and fluid switching and are particularly suitable for high productivity Atomic Layer Deposition (ALD) applications. Additional embodiments cover improved diaphragm and seal reliability, externally adjustable valve conductance, improved valve safety and high temperature valve seals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.