Thermal flow meter
US7748268B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2008 |
| Grant date | Jul 6, 2010 |
| Priority date | — |
| Expiry date | Dec 25, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal mass flow controller or mass flow meter having a novel sensor housing that reduces heat conduction from the housing mounting plate or base to the sensor itself. The housing also greatly minimizes the thermal gradient that can result from the uneven application of heat to the housing base. This reduction is accomplished in part by the use of one or more thermal isolation slots to isolate the upper portion of the housing (which holds the sensor) from the lower portion of the housing. Heat transfer to the sensor housing is also minimized by raising the middle portion of the bottom of the housing so that thermal contact is made between the base and the housing only at the two ends of the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.