Antireflective coating compositions
US7754414B2 · kind B2 · utility
3Cited by
2References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 12, 2006 |
| Grant date | Jul 13, 2010 |
| Priority date | — |
| Expiry date | Oct 27, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Antireflective coating compositions with reduced outgassing are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.